| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_14c9ad767fb6d5e9dabfb770d4e82252 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1631
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1603 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 |
| filingDate |
2002-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_435e252e50d3aeb52ccf1f0460b9d408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e972c3ccf5d1b1746ff058e9942b1ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_014389916e320249e687ad3b020dbcbf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc5c1d9bdb2a76dc26b12664b214b34c |
| publicationDate |
2004-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-I222122-B |
| titleOfInvention |
Slotted substrate and slotting process |
| abstract |
A method of manufacturing a slotted substrate includes forming (200) a masking layer (104) over a first surface of a substrate (102), and patterning and etching the masking layer to form a hole therethrough. The first layer (106) is deposited (220) over the masking layer and in the hole. The first layer is patterned and etched (230) to form a plug in the hole. A second surface of the substrate that is opposite the first surface is continuously etched until a bottom surface of the plug is substantially exposed and a slot (126) in the substrate is substantially formed. |
| priorityDate |
2001-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |