http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-594442-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-425 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42 |
| filingDate | 1998-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c826882a16a22660c91ec280f2b9955e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44e4962792b30bf2cc84a7a9af1417b1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d198b212800ec440a1be3a43bb8fd511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfa8c58422104a86e0e892424b77bb51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4595df237a3cf48adcc4d3ca568d9d90 |
| publicationDate | 2004-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-594442-B |
| titleOfInvention | Resist removing method and apparatus |
| abstract | A resist removing method and a resist removing apparatus using the method. The resist removing method includes providing a substrate and forming a resist on the substrate. Then the substrate is brought into contact with a resist removing agent comprising N alkanol alkoxy alkanamide, to remove the resist from the substrate. Alternatively, the substrate is brought into contact with a resist removing composition that may comprise N alkanol alkoxy alkanamide with an attack inhibitor, or alkanolamine and alkyl alkoxy alkanoate. Since the resist can be removed by a simple process in a short time, and since the resist removing apparatus can be reduced in size, the productivity of a semiconductor device fabrication facility can be enhanced. |
| priorityDate | 1998-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.