| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_78b6113e8627cad20efd53f9c9c75452 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0226
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-008
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate |
2002-12-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_561bf0e8fc45a65cfb56428e122f07fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a950f9ea307aeedbb0d16e4e187172d |
| publicationDate |
2004-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-594393-B |
| titleOfInvention |
Positive photoresist composition for manufacture of liquid crystal display device and method for forming resist pattern |
| abstract |
To provide a positive photoresist composition excellent in the linearity suitable for the manufacture of a system LCD, suitable for the exposure process under the condition of low NA and suitable for the i-line exposure and to provide a method for forming a resist pattern. The composition is prepared by dissolving (A) an alkali-soluble resin and (B) a quinonediazide esterified compound expressed by general formula (I) in (D) an organic solvent. In formula (I), D represents a hydrogen atom or a 1,2-naphthoquinonediazide-5-sulfonyl group. |
| priorityDate |
2001-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |