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filingDate 2001-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2004-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_305dbc6188f9e4963a4a955dd24c2e41
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publicationDate 2004-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-593994-B
titleOfInvention Sensor usable in ultra pure and highly corrosive environments
abstract A sensor operable at temperatures in excess of 400 DEG C is described. The sensor of the present invention operates without fluid fill. Is non-porous, non-contaminating and has no exterior exposed metallic component. The sensor includes a non-porous, impermeable sensing diaphragm that may be positioned in direct contact with fluids in an ultra-pure environment. The non-porous surface may be comprised of a layer of single crystal sapphire that is glassed to a backing plate. The sensor of the present Invention is suitable for use in a chemically inert pressure transducer for sensing pressures and/or temperatures in process fluids and may be molded directly into the high temperature plastic housing of the pressure transducer module.
priorityDate 2000-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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