http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-591759-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aea8583efc4aa4e2a9706d789804d37b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B41-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B69-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8247 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-115 |
| filingDate | 2001-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0d086cda5790a5fd26125d99bb8f54e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5dca086abe6bdbb04f77d228f73623b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bdc63543e6bf57b9caef7d859a23e9b |
| publicationDate | 2004-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-591759-B |
| titleOfInvention | Manufacturing method of flash memory |
| abstract | A kind of method for manufacturing flash memory is disclosed in the present invention, in which the stack gate is used as the mask to perform a shallow junction doping procedure onto the substrate formed with the stack gate, so as to form a shallow junction doped region in the substrate on both sides of the stack gate. Then, a mask layer is formed on the substrate, in which the mask layer covers the stack gate surface and the sidewall, and exposes part of the shallow junction doped region. After that, by using the mask layer as the mask, deep junction doping process is conducted onto the substrate, so as to form a deep junction doped region in the substrate on both sides of the mask layer. Finally, a thermal process is conducted after the mask layer is removed, so as to form the source/drain region having a shallow drain junction as well as a deep drain junction. |
| priorityDate | 2001-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID119434 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559589 |
Total number of triples: 18.