http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-591686-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45519 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate | 2002-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb7fb9ab5c4e7a6f87d8f4476453f035 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_348ce0f8400fd4b0cd576ae962b7825e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e016c29d45e9b1755f29b4690e3bfa16 |
| publicationDate | 2004-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-591686-B |
| titleOfInvention | Process chamber having multiple gas distributors and method |
| abstract | A substrate processing chamber has a substrate support to support a substrate, and an exhaust conduit about the substrate support. A first process gas distributor directs a first process gas, such as a non-reactive gas, about the substrate perimeter and toward the exhaust conduit at a first flow rate to form a curtain of non-reactive gas about the substrate. A second process gas distributor directs a second process gas, such as reactive CVD or etchant gas, toward a central portion of the substrate at a second flow rate which is lower than the first flow rate. A gas energizer energizes the first and second process gases in the chamber. A controller operates the substrate support, gas flow meters, gas energizer, and throttle valve, to process the substrate in the energized gas. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111341689-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I732373-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111341689-B |
| priorityDate | 2001-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.