| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F34-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D315-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D311-78 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D315-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F34-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D311-78 |
| filingDate |
2002-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aeb4a733f07318fcb9d53dd0e6e47619
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f19b611fef8c830266c1089c37fcf7a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dea43574b6a2c42ca28fc3f4063044cb |
| publicationDate |
2004-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-589512-B |
| titleOfInvention |
Ether monomers having multi-ring structure, and photosensitive polymer and resist compositions obtained from the same |
| abstract |
Provided are alkenyl ether-based monomers having multi-ring structure, and photosensitive polymers and resist compositions obtained from the same. The photosensitive polymer includes a monomer unit represented by the following formula, wherein R4 and R5 are independently -H or -CH3, and R6 and R7 are independently -H, -OH or a C1-C20 hydrocarbon-containing group. |
| priorityDate |
2001-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |