| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2602-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2603-86 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C43-313
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C61-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C45-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C29-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C33-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C49-567
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C45-68 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C33-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C45-45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C61-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-567
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C43-313 |
| filingDate |
2002-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a2693135a54c578b00da48e405a141aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3c7acfbd485f344276629696ed584ff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0698f82a780b5989637b873a055c597d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0390236efecb36ed2bb3c4e8ed3b002 |
| publicationDate |
2004-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-588038-B |
| titleOfInvention |
Process for preparing fluorine-containing norbornene derivative |
| abstract |
There are provided materials for a chemically amplifying type photoresist for a F2 laser which are excellent in transparency and possess improved dry etch resistance. Those materials are a novel norbornene derivative having a fluorine-containing ketone structure or a fluorine-containing tertiary alcohol structure directly bonded to a norbornene skeleton; a fluorine-containing polymer obtained using the norbornene derivative as a copolymerizing monomer; and a chemically amplifying type photoresist composition comprising the fluorine-containing polymer, a photoreactive acid-generating agent and a solvent. |
| priorityDate |
2001-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |