| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76825
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2002-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c5ab446b092ef510681460974593fec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_90e5a98336abb74e62baa86095f002e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d5e3874c60839c72f8f6620096ea815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b45558505929cbf76e175ac2c2df197f |
| publicationDate |
2004-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-575930-B |
| titleOfInvention |
Method for improving nucleation and adhesion of CVD and ALD films deposited onto low-dielectric-constant dielectrics |
| priorityDate |
2001-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |