| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
1996-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8e054927dda4762faf969d5e11a8f87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea1e459beb5b03fd5e84fb737d502d2b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfae59e959d199a8d35045973e8bd022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de27a84708e16a423c81ab096f33ceac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfd817b3b4b7b6b42ab0ea6796adcec2 |
| publicationDate |
2004-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-574627-B |
| titleOfInvention |
Chemically amplified positive resist composition |
| priorityDate |
1996-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |