| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc05229904be2987713acc8b41db7cd3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-151 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate |
2000-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8b952ec2db4663420182ce9cd010cf6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b615314e4283445004f1cd3a3ceb356
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f2259540353fa63d4383ba88e5e72c8 |
| publicationDate |
2004-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-573231-B |
| titleOfInvention |
An anti-reflection coating composition and process for forming a resist pattern using the same |
| priorityDate |
1999-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |