http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-571361-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2002-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2004-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c4fc36c286133423961283b05346377 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01cd19963303720d983c66c36402f1e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a40d349f03617619ed73ebcb7fd90686 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6037d6ddc8e8dfe248464fdd128a88fc |
| publicationDate | 2004-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-571361-B |
| titleOfInvention | Polishing agent and method for polishing a substrate |
| abstract | A polishing agent and polishing method suitable to perform a chemical mechanical polishing (CMP) process for planarizing the surface of the substrate of semiconductor element manufacturing are proposed. The polishing agent contains particle and a medium in which at least a part of the particles is dispersed, wherein the particle is at least one of (1) a cerium compound selected from cerium oxide, cerium, halide and cerium sulfide, having a density of 3 to 6 g/cm<3> and an average particle diameter of a secondary particle of 1 to 300 nm, and (2) metallic hydride of 4 valences. The polishing method, in which this polishing agent is used, actively utilizes the chemical activity of the particle in the polishing agent, while minimizing the mechanical effects, so as to minimize the polishing defects caused by the particle while polishing speed is increased. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I456048-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I804661-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9193032-B2 |
| priorityDate | 2001-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 422.