http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-565689-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b4f16dad1409661dabe7e733f9293792 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F17-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06T1-00 |
| filingDate | 2002-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0902c3443afd0db6ac12314b3ab852ab http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b2d9ac8278325639c8811dfffe3bfba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c3412f88c4c27aa70eb0d17b9669c851 |
| publicationDate | 2003-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-565689-B |
| titleOfInvention | Defect classification/inspection system |
| abstract | This invention is to provide a defect classifying/inspecting device having high classification accuracy. An object to be inspected is imaged by an imaging unit 20, and the featured values of the picture of a defective site extracted by the defect extracting part 50 are extracted and digitized by a feature extracting part 60. In a data base preparing part 70, as for defects belonging to a defect group selected and designated through a display/input part 74 by an operator, defects having similar features are grouped again by a defect classifying part 72 based on the feature information digitized by the feature extracting part 60, and a data base in which the defects of the object to be inspected are hierarchically classified is prepared on a data base memory 77. Also, in a classification implementing part 80, the defects of the object to be inspected are hierarchically classified based on the digitized feature information extracted by the feature extracting part 60 from the picture of the defective site of the object to be inspected extracted by the defect extracting part by referring to the data base applied from the data base preparing part 70. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I657725-B |
| priorityDate | 2002-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.