| abstract |
A method of producing a ceramic multilayer substrate comprises the steps of: (a) producing a green composite laminate 11 containing the first and second shrink-suppressing layers formed on one main surface 13 and the other main surface 14, respectively, of a green multilayer mother substrate 12 comprising a plurality of ceramic green layers 17; (b) forming first grooves 16 extending from the side 13 of the first shrink-suppressing layer to pass through the first shrink-suppressing layer 13 and reach a part of the multilayer mother substrate 12; (c) firing the composite laminate 11; (d) removing the first and second shrink-suppressing layers 13 and 14 and taking out the sintered multilayer mother substrate 11; and (e) dividing the multilayer mother substrate 12 along the grooves 16, and taking out a plurality of the ceramic multilayer substrates. Thereby, the shrink in the plane direction during firing can be suppressed. Thus, a ceramic multilayer substrate having a high dimensional accuracy and a high reliability can be produced with a high production efficiency. |