| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0b08374cf0cad9c6f3b663da00787c13 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B17-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-08 |
| filingDate |
2002-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_561aae0c965e62cb5fe9869762457e5a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a774bccd60c85665a2339c5f9fc6cd1c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36d07403ee122d2c99530b7c34a15ee8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31a569f2065cecdd848ba53ee94c8902
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_994d34ca6e7036b043b61ad515a2929e |
| publicationDate |
2003-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-554485-B |
| titleOfInvention |
Process for material-removing machining of both sides of semiconductor wafers |
| abstract |
The invention relates to a process for material-removing machining, on both sides simultaneously, of semiconductor wafers having a front surface and a back surface, the semiconductor wafers resting in carriers which are set in rotation by means of an annular outer drive ring and an annular inner drive ring and being moved between two oppositely rotating working disks in a manner which can be described by means of in each case one path curve relative to the upper working disk and one path curve relative to the lower working disk, wherein the two path curves after six loops around the center have the appearance of still being open, and at each point have a radius of curvature which is at least as great as the radius of the inner drive ring. |
| priorityDate |
2001-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |