| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74973199515dbabd2310245aab03e282 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6609
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-8222 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-861
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8222 |
| filingDate |
2001-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9bcd425ff1fd4f88b8e144ec6ae70faf |
| publicationDate |
2003-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-550633-B |
| titleOfInvention |
Method for manufacturing semiconductor device |
| abstract |
According to a method for manufacturing a semiconductor device having a junction boundary (18) where SiGe (2, 12) of a first conductivity type and Si (1, 11) or SiGe of a second conductivity type come in contact with each other, a portion (16) where the junction boundary is exposed on the surface is cleaned with a first solution containing hydrofluoric acid and is then cleaned with a second solution containing sulfuric acid. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I728364-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110249411-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110249411-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11342179-B2 |
| priorityDate |
2001-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |