http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-546694-B

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38e4b503b1979a5d277324483132316a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_54d600ecc035c6e5261c9690dd1d6a67
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76832
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
filingDate 2002-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2003-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf1d1b68de8f5c4fe9b3cc2aaf170356
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6b7217744d3ea65d2eb5d048f0ae1ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44f1611f4ab75e5bc7e86a2519d88c10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_569ecf9cc532dd8290965ccaeea74b61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3aa9aa7321e47cf19bc52022550ff65a
publicationDate 2003-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-546694-B
titleOfInvention Semiconductor device and method of manufacturing the same
abstract The present invention relates to a semiconductor device in which a barrier insulating film is formed to cover a copper film or a wiring consisting mainly of the copper film. In structure, the barrier insulating film 34a comprises a double-layered structure or more that is provided with at least a first barrier insulating film 34aa containing silicon, oxygen, nitrogen and hydrogen or silicon, oxygen, nitrogen, hydrogen and carbon, and a second barrier insulating film 34ab containing silicon, oxygen and hydrogen or silicon, oxygen, hydrogen and carbon.
priorityDate 2001-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23986
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70434
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23953
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411288742
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458434260
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453674567
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID70435
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11169
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577474
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66185
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID945
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457698762
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6327421
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458433298
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID153968748
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6396
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID429532466
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID431999234
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419579321
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419550829
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419511972
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544406
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID280
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559537
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544403
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415733498
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22737563
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23940
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577462
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123318
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426099013
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID131718991
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524686
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419519520

Total number of triples: 88.