| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b15b013bf794a899205d7620af4a1a4f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-1942 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-442 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J8-24 |
| filingDate |
1996-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1d85bacfd396d8ae52ec1d2a317ee95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddb1487e0d7bda821002a22d3f26c585 |
| publicationDate |
2003-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-541367-B |
| titleOfInvention |
Method and apparatus for silicon deposition |
| abstract |
Silicon beads (102) are produced by chemical vapor deposition (CVD) on seed particles (102) generated internal to a CVD reactor (10). The reactor (10) has multiple zones, including an inlet zone (116) where beads (102) are maintained in a submerged spouted bed and an upper zone (118, 120) where beads are maintained in a bubbling fluidized bed. A tapered portion (118) of the upper zone (118, 120) segregates beads by size. Systems for inspecting, sorting and transporting product beads are also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104583122-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I547419-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105392918-A |
| priorityDate |
1995-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |