| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_97411dac2a9aceddcf1140e97aad0a57 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2506-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2500-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2500-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2501-39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2500-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2501-395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61K35-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2501-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C12N2500-40 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D5-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61K35-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16 |
| filingDate |
1999-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec42d28710bf814854f5e5ef5e8ec5e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8b99944e2afee68fe98b1438bde0c9a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5099c5b653eca5c489cf7c5d591a5f6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_822ae2153e72d5cd72683d196d50d59d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bd5e466c217d9b47993f579e562965e |
| publicationDate |
2003-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-541361-B |
| titleOfInvention |
Method and apparatus for processing the surface of a microelectronic workpiece |
| abstract |
A reactor for plating a metal onto a surface of a workpiece is set forth. The reactor comprises a reactor bowl including an electroplating solution disposed therein and an anode disposed in the reactor bowl in contact with the electroplating solution. A contact assembly is spaced from the anode within the reactor bowl. The contact assembly includes a plurality of contacts disposed to contact a peripheral edge of the surface of the workpiece to provide electroplating power to the surface of the workpiece. The contacts excute a wiping action against the surface of the workpiece as the workpiece is brought into engagement therewith. The contact assembly also including a barrier disposed interior of the plurality of contacts. The barrier includes a member disposed to engage the surface of the workpiece to assist in isolating the plurality of contacts from the electroplating solution. In one embodiment, the plurality of contacts are in the form of discrete flexures while in another embodiment the plurality of contacts are in the form of a Beeleville ring contact. A flow path may be provided in the contact assembly for providing a purging gas to the plurality of contacts and the peripheral edge of the workpiece. The purging gas may be used to assist in the formation of the barrier of the contact assembly. A combined electroplating/electroless plating tool and method are also set forth. |
| priorityDate |
1998-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |