http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-540102-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_07e3c9dbe5f1891d540b555e4cce1342 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6659 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2001-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ea8220ad85799c334b7088966d0ae1b |
| publicationDate | 2003-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-540102-B |
| titleOfInvention | Formation method of oxide film |
| abstract | A formation method of oxide film capable of resisting corrosion from stripper is provided, during stripping Process, to resist corrosion of oxide film by ammonium hydroxide in stripper. In order to achieve above-mentioned purpose, this invention is mainly to implant nitrogen element into the skin layer of the above-mentioned oxide film to form a skin layer containing -O-N component on the above-mentioned oxide layer on top of a polysilicon layer so that corrosion by ammonium hydroxide in stripper is resisted. The method comprises: providing a substrate with a polysilicon layer thereon; depositing an oxide layer on the above-mentioned polysilicon layer by CVD; and performing an annealing treatment on the above-mentioned oxide layer in an atmosphere containing nitrogen element to form a skin layer containing -O-N components on the above-mentioned oxide layer on top of the polysilicon layer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I397107-B |
| priorityDate | 2001-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.