http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-533463-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 |
| filingDate | 2002-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a05207ef7b3cd0dfb062c3298eab6db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c06dd4106ba8b11c8e01fb7a7bcd612e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_562dbb21f59af7391609eef13a0937e2 |
| publicationDate | 2003-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-533463-B |
| titleOfInvention | Method of manufacturing a semiconductor device |
| abstract | When a laser beam is irradiated onto a semiconductor film, a steep temperature gradient is produced between a substrate and the semiconductor film. For this reason, the semiconductor film contracts, so that a warp in the film occurs. Therefore, the quality of a resulting crystalline semiconductor film sometimes deteriorates. According to the present invention, it is characterized in that, after laser beam crystallization on the semiconductor film, heat treatment is carried out so as to reduce the warp in the film. Since the substrate contracts by the heat treatment, the warp in the semiconductor film is lessened, so that the physical properties of the semiconductor film can be improved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9768414-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I505460-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9246128-B2 |
| priorityDate | 2001-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.