http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-529123-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2001-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f45025c8a9cfadcd85fa467deb60a61 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef34c94ca730a0fede81da4053bb42cc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4e4c88f442f8fd132a8ec681de86bb5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59b15f29851a9e1c2e9f63c7a0cdee5f |
| publicationDate | 2003-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-529123-B |
| titleOfInvention | Method of forming a titanium-containing glue layer |
| abstract | The present invention provides a method to form a titanium-containing glue layer and to reduce the diffusion of boron ion into a titanium-containing glue layer. The primary step is a nitrogen-ion implantation process in which the nitrogen ions are implanted into an interface region between a boron-ion doped region and a titanium-containing glue layer to form a nitrogen-ion-containing doped region. Afterward, a titanium-containing glue layer is conformally deposited on the surface of the nitrogen-ion-containing doped region by a TiCl4-based CVD method. Because the temperature used in the CVD is so high that an ion diffusion occurs in the interface region between the nitrogen-ion-containing doped region and the titanium-containing glue layer, a titanium nitride layer is then formed in the interface region by a contact of the titanium ions and the nitrogen ions. The boron ions can not pass through the nitrogen-ion-containing doped region and the titanium nitride layer into the titanium-containing glue layer. Consequently, the present method can avoid those problems caused by TiB. |
| priorityDate | 2001-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.