| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ad954b1707d771a72854b169c84da03e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2203-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0136
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2203-0288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B2203-0485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2208-00309
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2208-00212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2208-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S359-904 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00626
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-0453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B3-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00142
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-0496 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J8-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B3-16 |
| filingDate |
2001-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af01f5833d5cc74ead17b403e3600ea8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38309bb3e530429e468255c72f4cac5f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_87295a83d8626bdeea21ca0866d135b1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3272635996353c132f0fb0e4cce6c0b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1d0ab5275b7ce1341810a0f223062d0 |
| publicationDate |
2003-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-528884-B |
| titleOfInvention |
Micromirror unit fabrication method and micromirror unit made by the same |
| abstract |
A method of making a micromirror unit is provided. In accordance with the method, a micromirror unit is made from a material substrate having a multi-layer structure composed of silicon layers and at least one intermediate layer. The resulting micromirror unit includes a mirror forming base, a frame and a torsion bar. The method includes the following steps. First, a pre-torsion bar is formed by subjecting one of the silicon layers to etching. The obtained pre-torsion bar is rendered smaller in thickness than the mirror forming base and is held in contact with the intermediate layer. Then, the desired torsion bar is obtained by removing the intermediate layer contacting with the pre-torsion bar. |
| priorityDate |
2001-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |