http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-526673-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f705f295f4ba571f5311e5ef1b57807 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B3-20 |
| filingDate | 2000-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_951f3cc6581ad06938cb56332b863299 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_714d62ce42690127f6a3d4eb7388a833 |
| publicationDate | 2003-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-526673-B |
| titleOfInvention | Ceramic heater and supporting pin for semiconductor manufacturing and testing device |
| abstract | The present invention provides a ceramic heater which makes it possible to maintain the distance between a semiconductor wafer and the heating surface of a ceramic substrate constant at any time, heat the semiconductor wafer at an even temperature and prevent contamination of the semiconductor wafer. The ceramic heater of the present invention comprises a ceramic substrate on a surface of which or inside which a heating element is formed, in which the ceramic heater is constituted to have a structure that an object to be heated can be held apart from a surface of the ceramic substrate and heated. |
| priorityDate | 2000-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.