Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-0642 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D21-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12 |
filingDate |
2001-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2003-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ef4a3c7ed11cb674a0e451c45b0886f |
publicationDate |
2003-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
TW-526547-B |
titleOfInvention |
Apparatus for use in a deposition cell and method for depositing materials upon a cathode positioned within the deposition cell |
abstract |
An apparatus and associated method for use in a metal deposition cell during operation. The apparatus includes a perforated anode extending generally horizontally across the entire width of the metal deposition cell. Multiple perforations extend substantially vertically and are arranged to provide a substantially uniform electrolyte flow across the width of the metal deposition cell. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I419351-B |
priorityDate |
2000-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |