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publicationDate 2003-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-523912-B
titleOfInvention Capacitor stack structure and method of fabricating
abstract A capacitor structure that comprises a top platinum electrode and a bottom electrode having insulator on the sidewalls of the electrodes, and wherein the bottom electrode is from depositing a first electrode portion being recessed with respect to the insulator on the sidewalls thereof and depositing a second insulator portion is provided.
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