http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-519722-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
| filingDate | 1999-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5f211c504191f646565be997a16592f |
| publicationDate | 2003-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-519722-B |
| titleOfInvention | Method for producing metal plug |
| abstract | A method for producing a metal plug comprises: after forming a conformal barrier layer on an insulation layer and in a via, forming a metal layer on the barrier layer and filling up the via; etching back the metal layer on the barrier layer leaving a metal plug in the via; and performing a chemical mechanical polishing by using the insulation layer as an endpoint and a slower polishing rate, to polish the surface of the metal plug, thereby obtaining a smoother surface of the metal plug. |
| priorityDate | 1999-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.