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publicationDate 2003-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-517404-B
titleOfInvention Method of fabricating thermally stable MTJ cell and apparatus
abstract An MTJ cell including a tunneling layer of material between magnetic material layers with the tunneling layer of material having a greater attraction for a third material than the magnetic material layers. The third material is introduced to one or both so that when the cell is heated the third material is redistributed from the magnetic material layer to the tunneling layer. Upon redistribution the tunneling layer becomes a tunnel barrier material. Also, a first diffusion barrier layer is positioned between a first metal electrode and one of the magnetic material layers and/or a second diffusion barrier layer is positioned between a second metal electrode and the other magnetic material layer to prevent diffusion of the metal in the electrodes into the magnetic material layers.
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