http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-512397-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_65181e333045c402dadb891169c6c899 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F26B21-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2000-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e0ea4b9e1bd592e68618d0255e6b6e4 |
| publicationDate | 2002-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-512397-B |
| titleOfInvention | Device and process for drying disk-like objects |
| abstract | The invention pertains to a process for producing a drying gas for drying one or more disk-like objects, in which process a carrier gas and an active substance are mixed, as well as a drying process that uses the drying gas that is produced in this manner. The invention also pertains to a drying gas production device that is suitable for mixing a carrier gas and an active substance. |
| priorityDate | 1999-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.