http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-503469-B

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B9-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-027
filingDate 2001-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2002-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96d46481501828c92f1cbb9672238390
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a869e50740ed5baa6f69dd66199134e2
publicationDate 2002-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-503469-B
titleOfInvention Cleaning method for coater
abstract This invention provides a cleaning method for a coater that the coating liquid is diluted by a remaining liquid detergent is prevented when a new coating liquid is supplied after the cleaning of the coater. The inside of a pipeline, etc., are cleaned by opening, closing, or opening and closing valves, a first valve V1 to a fourth valve V4, installed in a supply pipeline 1 for supplying a coating liquid to a coating nozzle N, in an air discharge pipeline 2 for discharging air from the coating nozzle, and in a pump-air discharge pipeline 3.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I381887-B
priorityDate 2000-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10929
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21028165
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13332872
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451974567
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159395647
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419535335
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412216865
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410522246
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454471874
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID57471553
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11509
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419537456

Total number of triples: 35.