http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-500972-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31544 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-3154 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-64 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-62 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-64 |
| filingDate | 2001-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f547659a3ddd38a252630d9df024dae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_910f7cfb8242c99686d4e07385135997 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dec845b1272e9ff854a7a285eb86aa52 |
| publicationDate | 2002-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-500972-B |
| titleOfInvention | Pellicle |
| abstract | A pellicle for a photolithographic patterning process by means of a light having a wavelength of at most 200 nm, comprising a frame and a pellicle membrane bonded to the frame by means of an adhesive, wherein the pellicle membrane or the adhesive comprises the following fluorine-containing polymer (A): fluorine-containing polymer (A): a substantially linear fluorine-containing polymer having a chain of carbon atoms as the main chain, and containing as carbon atoms in its main chain, a carbon atom having one or two hydrogen atoms bonded thereto and a carbon atom having no hydrogen atom bonded thereto and having a fluorine atom or a fluorine-containing organic group bonded thereto. |
| priorityDate | 2000-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 71.