http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-482891-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f9dddb92d1d03427c9522cdd899619b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02 |
| filingDate | 2000-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab651e19eafc0fa9d4c82776c4503923 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_006c92e8b254e069f031762299557820 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_141f184f26966ba2b9fdff5081d9cf2e |
| publicationDate | 2002-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-482891-B |
| titleOfInvention | Measurement method of interferometric ellipsometer and electro-optic system |
| abstract | The present invention proposes a novel measurement method of interferometric ellipsometer and electro-optic system, wherein a Mach-Zehnder interferometer, differential amplifier and amplitude demodulation device is used to complete the real-time measurement of the ellipsometric parameters, and which can be applied in the dynamic measurement of the gap between two interfaces. |
| priorityDate | 2000-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 18.