http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-477033-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 2001-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad01454d902427d0afd292a1271ff0d7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_036412ec60e433e24eaad16516b43731 |
| publicationDate | 2002-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-477033-B |
| titleOfInvention | Dual damascene process utilizing composite etching stop layer |
| abstract | There is disclosed a method for manufacturing a dual damascene structure, which comprises: first, sequentially depositing a barrier layer, a first low-k material layer, a composite stop layer, a second low-k material layer on a semiconductor substrate, wherein the composite stop layer comprises a first etching stop layer located at a lower part and a second etching stop layer located at an upper part, and the etching selectivity between the first etching stop layer and the barrier layer is larger than 4:1; next, etching the second low-k material layer, composite stop layer, and first low-k material layer to define a contact tube on the surface of the barrier layer; etching the second low-k material layer to define a trench opening on the composite stop layer and above the contact tube; then, etching part of the barrier layer at the bottom of the contact tube to expose the upper surface of the semiconductor substrate, wherein the first etching stop layer can protect the first low-k material layer from being eroded by the etching plasma; and filling metal in the trench opening and the contact tube, thereby forming a dual damascene structure. |
| priorityDate | 2001-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.