http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-476107-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 2000-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2002-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0868c46626567f530d780627ae93d8c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_81527e1e4b3d04261b707115ac38a9e2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee8214e744e2133f2d603f4edb178a9c |
| publicationDate | 2002-02-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-476107-B |
| titleOfInvention | Semiconductor device and method of manufacturing the same |
| abstract | The present invention is aimed to prevent deterioration of the withstand voltage of a PN junction and increase in the resistance of a fine cobalt silicide lead line, which would otherwise be caused by coagulation of cobalt silicide, in the wiring of a semiconductor device having a cobalt silicide layer. A cobalt film is formed on a silicon film laid on a semiconductor substrate, and a wafer is heated to form a Co silicide film. Co which has not reacted with Si is removed. Then, a silicon film is formed on the Co silicide film, and the wafer is heated, to thereby change the Co silicide film to a disilicide film. |
| priorityDate | 1999-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.