http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-469557-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d527f9a5c3e991a1797de3518a88d14 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-956 |
| filingDate | 2000-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_822e910e15767d797fd3733ce2d403dc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aac6f32cc9a09be5d6d3a91cb0761331 |
| publicationDate | 2001-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-469557-B |
| titleOfInvention | Surface state monitoring method and apparatus |
| abstract | The surface state monitoring apparatus comprises an incidence optical system 16 for introducing infrared radiation into a substrate-to-be-monitored 12, a detection optical system 30 for detecting infrared radiation which has undergone multiple reflections inside the substrate-to-be-monitored and exited from the substrate-to-be-monitored, a surface state monitoring means 38 for monitoring a surface state of the substrate-to-be-monitored, based on the detected infrared radiation by the detection optical system, a position detecting means 17 for optically detecting a position of the substrate-to-be-monitored, and a control means 28 for controlling a position and an angle at which infrared radiation to be incident on the substrate-to be monitored, corresponding to the position of the substrate-to be-monitored, which has been detected by the position detecting means. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010070274-A |
| priorityDate | 2000-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.