http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-454286-B

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6af1aac0717028a45913e80d9e05fad8
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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60
filingDate 2000-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2001-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_65d7dc7dab1fd77d74772ff21a415faf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a4144adce1d6a6055f7120574bc022b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3dd81062c98bea4d0da74873ad0f102d
publicationDate 2001-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber TW-454286-B
titleOfInvention Manufacturing method of testing connection points on the peripheral bond pads of flip chip
abstract There is provided a manufacturing method of testing connection points on the peripheral bond pads of flip chip, which can be used on fine-pitch peripheral bond pad formed on a flip-chip semiconductor to form the testing connection points. Therefore, the circuit testing instrument dedicated to the peripheral bond pad can perform a circuit test procedure to the internal circuit of the semiconductor chip via the testing connection points. The manufacturing method of testing connection points on the peripheral bond pads of flip chip is characterized in using a NiV/Cu metallization structure layer to form the required testing connection points. Also, an under bump metallization structure layer is formed on this area array pads for being used as the bonding pads of the solder bumps. The manufacturing method of testing connection points on peripheral bond pads of flip chip has an advantage in using low resolution photolithography etching apparatus to define the photoresist mask while the aluminum peripheral bond pads are not damaged by corrosion.
priorityDate 2000-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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