http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-446987-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed89ca88042d3b6f7afc21d7b6dd7b87 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0475 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate | 2000-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e3d75956f253535e256b78af5384726 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7688fb1b19d6f756c43294b2e317f9f5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5c90c3a2e828913b5271615f626ff11 |
| publicationDate | 2001-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-446987-B |
| titleOfInvention | Method and apparatus for low energy ion implantation |
| abstract | An ion implanter for low energy ion implantation includes an ion beam generator, a holder for supporting a workpiece, such as a semiconductor wafer, and a voltage source electrically connected to the workpiece. The ion beam generator includes an ion source for generating ions and an extraction electrode having an extraction voltage applied thereto for accelerating the ions to form an ion beam. The voltage source applies to the workpiece a bias voltage that is of opposite polarity and smaller magnitude than the extraction voltage. The ions in the ion beam are implanted in the workpiece with an energy that is a function of the difference between the extraction voltage and the bias voltage. |
| priorityDate | 1998-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23940 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577462 |
Total number of triples: 18.