http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-438898-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dca153f19868f747eeea612b047a9e7c |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-081 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 |
| filingDate | 1998-01-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a5ed9c2c30430cfa8b32121b9e385387 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ead2bdf86bef48cf108c82b5ac6da3d7 |
| publicationDate | 2001-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-438898-B |
| titleOfInvention | Film growth method and film growth apparatus capable of forming magnesium oxide film with increased film growth speed |
| abstract | An auxiliary anode (30) having a ring-shaped permanent magnet (31) is placed in a vacuum chamber (11) such that the auxiliary anode is coaxial with a central axis of a hearth (20) and is positioned so as to surround an upper area of the hearth. A plasma beam generated by a plasma beam generator (13) using arc discharge is guided into the hearth. Magnesium (Mg) is used as a vaporization material on the hearth. Gas mixed with oxygen is supplied into the vacuum chamber. As a result, magnesium particles sublimated from the hearth react with oxygen plasma generated by the plasma to form a magnesium oxide (MgO) film on a substrate (40). |
| priorityDate | 1997-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.