http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-436876-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ddbd9538efce6e134d471b912946264e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-102 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 1998-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_791c8b8cbe2eaefb755b7fde55eafd68 |
| publicationDate | 2001-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-436876-B |
| titleOfInvention | Method and device for removing mobile ions in a wafer |
| abstract | The present invention discloses a method and a device for removing mobile ions in a wafer. The device in the present invention includes a fluid supply nozzle for supplying a first fluid, a reaction area for transforming the first fluid into an active material with electric charges, and a wafer set for disposing the wafer electrically connected to a voltage and for inducing the mobile ions to move to the surface of the wafer, wherein the mobile ions can react with the charged active material formed in the reaction area to form a material which can escape from the wafer and the mobile ions thereof are removed. |
| priorityDate | 1998-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.