http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-436590-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_340649364548937a01cef840349f4fca |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-7797 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0396 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-7823 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05D16-0661 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16K31-126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D16-06 |
| filingDate | 2000-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cafefa56614409a4219daa63d3ed979 |
| publicationDate | 2001-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-436590-B |
| titleOfInvention | Fluid pressure regulator, method of controlling a regulator and method of operating a fluid circuit |
| abstract | A fluid pressure regulator and method of operating the same particularly adapted for use in alternating flow and no flow modes as in the batchwise delivery of pressurized gases used in semiconductor manufacture. Such regulator and method include a controlled differential pressure capability which provides for the application of a differential pressure force independently of a main pressure setting force. As a result, operation of the regulator may be controlled to obviate pressure creep at the regulator outlet. |
| priorityDate | 1999-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID522684 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419526467 |
Total number of triples: 18.