http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-434704-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10cd067474edb79f198ed3f34fbf61b6 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-414 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-414 |
| filingDate | 1999-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3e1f572d17fe25712116f174076b61c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a5c849c5b764730a5b31ce53a069b27 |
| publicationDate | 2001-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-434704-B |
| titleOfInvention | Device of amorphous WO3 ion sensitive field effect transistor (ISFET) and method for making the same |
| abstract | The present invention uses a radio frequency sputtering method to prepare an amorphous WO3 film field effect type ion sensitive element. The structure of the sensitive element comprises a WO3/SiO2 dual-layer gate structure, and it has a good sensitivity in an aqueous solution, particularly it has an excellent sensitivity in an acid buffer solution, i.e. pH=1 to pH=5. The sensing element using an amorphous WO3 as a sensing film has a sensitivity of 50 to 58 mV/pH, and a good linearity in sensing. Therefore, in the present days of highly environmental consciousness, the amorphous WO3 ISFET prepared by a radio frequency sputtering has a high feasibility and applicability in the detection of water pollution. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112626459-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112626459-B |
| priorityDate | 1999-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.