| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-39 |
| filingDate |
1998-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eb307f5bbdf5f80516521539733f09b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7657b29d376a8f1083d5c897c05b25aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75a8f12f56c6ba3f24591b4d4a02c9f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f50d0878fae7242c6c2042fe4ad540d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae867112e4cfbf8443e2eb0ded9e3917 |
| publicationDate |
2001-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-426557-B |
| titleOfInvention |
Method for cleaning semiconductor device |
| abstract |
A method is provided for treating a plurality of semiconductor substrates using the same aqueous SC-1 solution which solution removes and/or inhibits contamination of the semiconductor surfaces by metallic ions present in the solution or on the substrate surface comprising a basic solution containing hydrogen peroxide and an oxidation-resistant chelating additive such as CDTA in an amount effective to provide the desired treatment results. The SC-1 solution may be the conventional 5:1:1 (water: NH4OH:H2O2) solution or a dilute solution such as a 5:x:1 to 200:x:1 solution wherein x is 0.025 to 2. |
| priorityDate |
1997-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |