| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-3127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-3124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-0396 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B67D7-0283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E03C1-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B67D7-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B67D7-0272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B67D7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/E03C1-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F17D1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B67D7-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B67D7-02 |
| filingDate |
2000-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5190276b4b8070e5263283ab59437dd |
| publicationDate |
2001-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-418299-B |
| titleOfInvention |
Liquid delivery system and its use for the delivery of an ultrapure liquid |
| abstract |
The liquid to be delivered leaves a container (3A, 3B) maintained at a first overpressure P1, from where it is transferred to an intermediate storage tank (11) maintained at a predetermined intermediate pressure P2>P1. Several small-volume delivery containers (12A, 12B), each of which may be pressurized wither to a delivery pressure P3>P2 or to filling pressure P4<P2, are connected in parallel downstream of this tank. Application to the delivery of ultrapure chemicals intended for the microelectronics industry. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100668392-B1 |
| priorityDate |
1999-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |