| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ddcb273a108a5d8472b335280098e06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 |
| filingDate |
1998-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8d50c70c709083ab914c9649f9621e0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b49a96393402a81f8a23aba7c17575f2 |
| publicationDate |
2000-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-406317-B |
| titleOfInvention |
Method to produce a barrier-layer in a semiconductor-body and semiconductor component with such a barrier-layer |
| abstract |
The design of this method is to arrange a barrier-layer (28; 30a) on the contact-plug (16) of a semiconductor-body (10), so as to prevent the oxidation of said contact-plug (16). Said barrier-layer (28; 30a) according to this invention is generated through the chemical reaction of a pre-structurized metallic transition-material (30) with at least one reaction-partner (32). |
| priorityDate |
1997-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |