| abstract |
A negative resist composition comprising an alkaline-soluble resin containing a polyvinylphenol resin whose phenolic hydroxyl group is partially alkyl-etherified, a sulfonate of a N-hydroxyimide compound as an acid generator, and a crosslinking agent, wherein a dispersion degree of the polyvinylphenol resin determined by gel permeation chromatography is within the range from 1.01 to 2, and using the negative resist composition, resolution and profile are improved. |