http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-399346-B
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_628db03ba4f8948ecd211fb3d46b9ef4 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L49-02 |
filingDate | 1996-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2000-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_440083d2b18d63814ab6466b742d24f4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b865c30d4e6898615ec1b68d6e534b07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d51a2259cd27ebdb6eda4996d7aefdb4 |
publicationDate | 2000-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | TW-399346-B |
titleOfInvention | The method of region selective growth of diamond film |
abstract | The method of region selective growth of diamond film consists of forming a pre-determined pattern on the silicone base plate using a shield. This shield is used as a mask and gives the growth position of the diamond on the unmasked silicone base plate. After the shielding is deprived, the combination of CxHy (or CxHyOz) and CO2 is used as the raw gas. After the first growth stage of diamond film, the silicone base plate is immersed into the solution containing HF and HNO3 to deprive the diamond core of undeserved growth region. Finally, growing continuous diamond film pattern is applied onto the second stage. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9891030-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9470485-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8318029-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8778196-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9921017-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7309446-B1 |
priorityDate | 1996-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.