| abstract |
This is a wafer processor, which can suppress particles generation in wafer processing. A wafer processor 101 transfers wafer and performs a series of processing operations upon the wafer, including several pivoting robots 104 to 108 and several units 110, 120, 130, 140, 160, 170, 180 and 190. The pivoting robots 104 to 108 have body and arm. Body can rotate and will not move in horizontal direction. The arm, which is extended from body, can hold the wafer. The wafer is transported in and out of each processing unit by the rotating robots 104 to 108. |