http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-394941-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2e3b8a022b684848025637ee768191f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D1-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B7-26 |
| filingDate | 1997-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58b1f3e8daed98a50811fe8524e73edb |
| publicationDate | 2000-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-394941-B |
| titleOfInvention | Galvanic deposition cell having a substrate holder |
| abstract | The invention relates to an apparatus for the galvanic deposition of a metal layer on a substrate (87), comprising a substrate holder (83) having a driven shaft (84) extending in a direction perpendicular to the substrate surface, wherein the cathode current is supplied to the substrate (87) by the shaft (84) having an outer insulating layer, the substrate (87) being held in contact with a contact plate (108) by a supporting ring (126) on the outer periphery of a supporting plate (86), wherein the contact plate (108) rests on a base (102) of the supporting plate (86) and has a central sleeve (142) connectable with the shaft (84). A mounting portion (104, 106) is provided in the base (102) around the sleeve (142), a tube portion (146) being inserted into the mounting portion in a sealing and detachable manner. An internally threaded ring (152) is arranged on the shaft (84) such as to be shiftable along the shaft axis, wherein said internally threaded ring (152) is detachably connectable to the tube portion (146) and seals the tube portion (146) and the shaft (84) against intrusion of the electrolyte. |
| priorityDate | 1996-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.