| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67303
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67309
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4583
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 |
| filingDate |
1997-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d857b7a2f38771ae270cf5c5774e183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5f2f0797063404d816dd2d463bdf3ec
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_211f228ca700d4fa16ae9134e3c8e646
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_352e7bc57560deddcc3c3aff2b9805ee |
| publicationDate |
2000-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
TW-392198-B |
| titleOfInvention |
Wafer boat and filmformation method |
| abstract |
A wafer boat that supports a plurality of semiconductor wafers at a predetermined pitch, which are to be processed by a vertical thermal processing furnace, comprises a plurality of support columns; wafer support grooves formed in the support columns for supporting the peripheral edges of the wafers; and a film thickness equalization plate that is substantially the same size as the wafers, or is larger than the wafers, and is provided in wafer support grooves that are adjacent to one another in the vertical direction. This configuration ensures the same type of film is formed on the surface facing the surface of the wafer, achieving uniformity of the thus-formed film thickness. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I716627-B |
| priorityDate |
1996-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |