http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-388067-B
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-08 |
| filingDate | 1997-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2000-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e40827776170a3a5177566844f66a4d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc5da326f9dd4f61fe8a394d5096ca1d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26c1731cb9cfb2b17149b701566e3ed9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fcbc993527f94db4b35a3afab2e734ba |
| publicationDate | 2000-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | TW-388067-B |
| titleOfInvention | Method and apparatus for coating a film on an object being processed |
| abstract | Disclosed herein is a method and an apparatus for applying a coating liquid to an object from a liquid-applying member at a first prescribed position, thereby forming a film on the object. Before the coating liquid at the first position, the coating liquid is applied at a second predetermined position. An impurity-detecting device detects the impurities contained in the coating liquid aplied at the second position. A particle-counting device is provided, and a switching device is providd on a liquid-supplying pipe extending from a source of the coating liquid to the liquid-applying member. The switching device switched the supply of the coating liquid between the liquid-applying member and the impurity-detecting device. The impurities in the coating liquid can thereby monitored. |
| priorityDate | 1996-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.